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High-temperature heating stages adopt high-conductivity non-metallic ceramic panels, featuring no oxidation under extreme heat, thermal conductivity close to aluminum plates, superior heat transfer, corrosion resistance and permanent anti-deformation performance. Vacuum pumping and nitrogen / other inert gas filling functions are supported, with temperature control range from ambient temperature up to 900℃. The 800℃ heating stage reaches 800℃ from room temperature within 20 minutes. Custom sizes and temperature ranges are available upon customer demand.
800℃ High Temperature Vacuum Heating Stage
1. High Insulation & Programmable Controller Advantages
High insulation isolation between heating chuck and main equipment body prevents host damage caused by ultra-high temperature. High-performance programmable controller supports heating, holding and cooling segments (max 30 programmable steps) for full automatic thermal cycling. We are a professional heating plate manufacturer with 10 years independent R&D & in-house production capacity. Contact us for complete technical datasheets and custom solutions.
2. Structure & Core Features of 800℃ Heating Stage
Full stainless steel housing; temperature controller connected via dual plug-in cables. Custom multi-segment programmable thermal profiles including heating, soaking and cooling stages. Supports vacuum evacuation and nitrogen/inert gas purging, temperature control range: ambient ~ 800℃.
- User-friendly operation, compact structure, equipped with 100mm observation window, fully compatible with glove box processing workflow.
- Superior heating surface uniformity, high temperature control precision, anti-deformation & anti-corrosion; fast ramp rate and multi-segment programmable temperature regulation.
- Customizable temperature ranges, dimensions and functional modules per customer specifications.
- Vacuum chamber: stainless steel; top cover: high-grade aluminum alloy.
- Standard accessories: 1 pressure gauge, 1 KF vacuum angle valve, 1 gas inlet valve, 1 vent valve, 1 KF16 gas inlet port, 1 KF25 reserved port, 1 temperature control cabinet, 1 corrugated tube.
3. Application Range
Suitable for semiconductor silicon wafers, glass slides, chips, substrates, ITO conductive glass processes: thin film baking & curing after photoresist coating. Widely used in industrial factories, scientific research institutes and universities for thermal aging tests, drying, baking and high-temperature heat treatment for production, R&D and teaching experiments.
4. Complete Model Configuration Parameters
| Parameter Item | ET-150200ZK | ET-600LDQF | ET-220KJ |
|---|---|---|---|
| Temperature Control Range | Ambient ~ 800℃ | Ambient ~ 600℃ | Ambient ~ 300℃ |
| Heating Area (mm) | 160×160 | 160×160 | 220×220 |
| Effective Constant Temp Zone (mm) | 160×160 | 100×100 | 220×220 |
| Temperature Resolution | 0.1℃ | 0.1℃ | 0.1℃ |
| Temperature Control Accuracy | ±1%℃ | ±1%℃ (in inert gas) | ±1%℃ |
| Control Mode | 30 linear programmable segments | 30 linear programmable segments | 6 storage programs, 30 heating segments per recipe |
| Surface Uniformity | ±1%℃ | ±1%℃ | ±1%℃ |
| Heating Panel Material | Aluminum embedded ceramic panel | 309S special stainless steel | Hard anodized aluminum |
| Timer Range | 1 min ~ 999.9 min | 1 min ~ 999.9 min | 1 min ~ 999.9 min |
| Observation Window Diameter (mm) | 100 | N/A | N/A |
| Power Supply | AC220V 50Hz | AC220V 50Hz | AC220V 50Hz |
| Max Power | 500W | 600W | 800W |
| Overall Dimension (mm) | 210×210×165 | 230×190×185 | 400×300×290 |
| Net Weight | 28 Kg | 6 Kg | 15 Kg |
5. Ceramic Heating Plate Thermal & Mechanical Material Properties
| Material Property Index | Technical Value Range |
|---|---|
| Bulk Density | 3.0 ~ 3.6 g/cm³ |
| Elastic Modulus | 300 ~ 350 GPa |
| Specific Heat Capacity | 4.8 ~ 6.6 J/(g·℃) |
| Thermal Conductivity | 120 ~ 180 W/(m·K) |
| Compressive Strength | 100 ~ 200 MPa |
| Volume Resistivity | 5 × 10⁻¹² Ω·cm |
| Average Linear Thermal Expansion Coefficient | 4.0 ~ 4.6 ×10⁻⁶ /℃ |
| Vickers Hardness (HV) | 600 ~ 700 HV |
| Melting Point | 1750℃ |
| Max Continuous Operating Temp | 1350℃ |
| Corrosion Resistance | Excellent |
| Machinability | Low precision machining performance |
| Water Resistance | Strictly avoid moisture during heating operation |
| High-Temperature Burst Failure Rate | 0.015% |
| Anti-Oxidation Temperature Limit | 1600℃ |
| Minimum Machinable Dimension | 3.0 mm |
The 800℃ heating stage reaches 800℃ from ambient temperature within 20 minutes. High thermal insulation isolation separates heating chuck and machine body to protect main equipment from high temperature damage. High-performance programmable controller supports 30 independent heating/holding/cooling program segments with full automatic thermal cycle programming. We own 10 years professional heating plate R&D & manufacturing experience with full independent design and production. Contact our technical team for complete technical drawings and detailed parameter support.
