The flowing atmosphere vacuum heating stage, also known as photoresist bake hot plate, supports nitrogen and other inert gas purging. The temperature range is ambient temperature up to 600℃, and custom specifications and temperature grades are available. It is widely used for eutectic sintering of microwave devices, microwave assemblies and TR modules. The unit provides inert gas shielding, and the LCD control panel displays all process parameters. The maximum heating temperature reaches 450℃. A glass viewing window is sealed with silicone rubber gaskets.

1. Simple operation, compact structure, designed for high-temperature heating under controllable flowing protective atmosphere.
2. Heating plate with excellent temperature uniformity and high control precision. Anti-deformation and corrosion resistant; fast temperature rise and multi-segment programmable temperature control.
3. Controllable flowing atmosphere effectively prevents oxidation for air-sensitive samples and avoids moisture absorption for humidity-sensitive materials.
4. For high-temperature sintering of semiconductor electrode films, polymer components inside the layer will carbonize and be carried away quickly by the flowing gas without blocking nanopores.
5. Customizable heating stages with different sizes and maximum temperatures (400℃, 500℃, 600℃, 800℃ optional).

Suitable for thin-film drying and curing after surface coating on silicon wafers, glass slides, chips, substrates and ITO conductive glass. It can be used for aging tests, temperature experiments, drying, baking and heat treatment in factories, universities and research institutes for production, scientific research and teaching.

• Panel material: 309S high-temperature stainless steel; ceramic or aluminum alloy optional
• Voltage: AC220V
• Overall dimension: 230 × 190 × 185 mm
• Heating zone: 220 × 220 mm
• Effective constant-temperature zone: 220 × 220 mm
• Temperature range: Ambient ~ 600℃
• Temperature accuracy: ±1% (without gas flow)
• Temperature resolution: 0.1℃
• Atmosphere: Air or inert protective gas
• Power: 1500W (10A)
• Control mode: 30-segment programmable temperature program

1. Connect power and turn on the main power switch. The green power indicator will stay on to confirm power input.
2. Turn on the heating switch. The red heating lamp stays solid on during continuous heating; it flashes once constant temperature is reached with intermittent heating.
3. After use, turn off the heating switch first. The green power light remains on as a warning that the plate is still hot; do not touch the surface. Turn off the main power only after the plate fully cools down (at least 1 hour).

1. Use AC220V three-prong grounded socket with leakage protection switch.
2. Do not open the cabinet or modify internal wiring without professional authorization.
3. Never touch the hot plate directly to avoid scalding.
4. Cut off power completely when not in use for a long time.
5. The unit is equipped with forced air cooling; do not block the side air intake vents.